EDS

Caution

VERY ROUGH DRAFT - @bobleesj and Guoliang Hu took notes and pictures during training. This document will be updated with more detailed steps and images.

TODO:

• Add step-by-step images for TEM mode
• Clarify STEM mode beam settings
• Add screenshots for drift correction setup

This guide covers Energy Dispersive X-ray Spectroscopy (EDS) on the Spectra 300.

Prerequisite: Complete the STEM alignment procedure before starting.

Acronyms:

• EDS - Energy Dispersive X-ray Spectroscopy
• SI - Spectrum Imaging

Part 1: TEM mode EDS

1. Select area

   • Select the area of interest on your sample

2. Open EDS

   • Click on the EDS icon in Velox

     

3. Check experiment log

   • Review the experiment log for acquisition parameters

Part 2: STEM mode EDS

1. Set beam parameters

   • Go to Beam Setting → Probe → click on MF-Y
   • Change convergence angle to 10 mrad (larger area to focus)
   • Increase screen current to 0.4 nA

2. Start spectrum imaging

   • Go to SI (Spectrum Imaging)

   • Click on the rectangle selection tool

   • Select an area on the sample

     

   • For nanoscale resolution, choose 20 microsecond dwell time

3. Set drift correction

   • Click on Drift Area to enable drift correction

   FIXME: add image for drift area selection

4. Adjust parameters

   • Use Object Properties to change acquisition parameters

5. Acquire data

   • Wait until pixel count stabilizes (watch for 8 pixel indicator)

     

   • Stop recording when complete

Part 3: Data processing

1. Draw line profile

   • Go to Processing to draw a line profile across features

     

2. Select arbitrary area

   • You can also select an arbitrary area for analysis

3. Atomic mapping

   • For atomic resolution mapping, use Average or Gaussian filtering

     

   • Use highest frequency and edge smoothing settings to obtain atomic resolution

Part 4: End session

Follow the steps in End session.

Changelog

• Dec 18, 2025 - initial rough draft by Guoliang Hu and @bobleesj